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190:(ALD), as the solution for the manufacturing of the EL-devices which required thin films with very high dielectric strength. The technology was brought into industrial production of EL devices in the mid-1980s by Lohja Corporation in Finland. Atomic Layer Deposition later became one of the key manufacturing techniques in the
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Corporation, created via the fusion of Neste
Corporation, and the national Electric Utility Company. Suntola’s activity in Fortum was focused to renewable energies and advanced energy technologies. He retired from Fortum in 2004, but continues as a Board Member in Picosun Oy, a Finnish manufacturer
206:, a major supplier of semiconductor manufacturing equipment; Microchemistry Ltd. became ASM Microchemistry Oy as ASM’s Finnish daughter company. In 1997, preceding the acquisition of Microchemistry Ltd, Suntola started as Research Fellow in the national energy company
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to apply the ALD technology to new application areas like thin film photovoltaic devices, heterogeneous catalysts, and most importantly, to semiconductor devices. In 1998, Microchemistry Ltd., and the ALD technology, was sold to Dutch
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S. Haukka, E.-L. Lakomaa, T. Suntola, "Adsorption controlled preparation of heterogeneous catalysts", Adsorption and its
Applications in Industry and Environmental Protection, A.Dabrowski, ed, Elsevier Science Publishers
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R. L. Puurunen, H. Kattelus, T. Suntola, "Atomic layer deposition in MEMS technology", Ch. 26 of
Handbook of Silicon Based MEMS Materials and Technologies, Ed. V. Lindroos et al. , pp. 433–446, Elsevier,
135:(born 1943) is a Finnish physicist, inventor, and technology leader. He is best known for his pioneering research in materials science, developing the thin film growth technique called
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T. Suntola, "Atomic Layer
Epitaxy", Handbook of Crystal Growth 3, Thin Films and Epitaxy, Part B: Growth Mechanisms and Dynamics, Chapter 14, Elsevier Science Publishers B.V., 1994.
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The extremely thin isolating or conducting films needed in microprocessors and computer memory devices can only be manufactured using the ALD technology developed by Tuomo
Suntola.
159:. He showed interest in technology early on, building wooden replicas of second world war aircraft. In his teens his interests expanded and he progressed to radios and amplifiers.
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266:" The 74-year-old was awarded one million euros ($ 1.18 million). His technology is used to manufacture ultra-thin material layers for a variety of devices such as computers,
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Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; Boyadjiev, Stefan; Cameron, David C.; Chen, Rong; Chubarov, Mikhail (2016-12-16).
521:"2018 Millennium Technology Prize for Tuomo Suntola – Finnish physicist's innovation enables manufacture and development of information technology products"
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1985-03-05/1990-03-13, US 4,907,862 Suntola, Method for generating electronically controllable color elements and color display based on the method
400:"Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the "Virtual Project on the History of ALD""
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T. Suntola, "Atomic Layer
Epitaxy", Materials Science Reports, Volume 4, number 7, December 1989, 0920-2307/89, Elsevier Science Publishers B.V.
239:, Suntola traces the development of the scientific picture of reality from antique to present day, culminating in the Dynamic Universe theory.
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In 1974, Suntola started the development of thin film electroluminescent displays in the
Finnish company Instrumentarium Oy. He introduced the
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T. Suntola, "On the
Mechanism of Switching Effects in Chalcogenide Thin Films", Solid-State Electronics 1971, Vol. 14, pp. 933–938
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1991-07-16/2002-12-31, US 6,500,780 Suntola et al., Method for preparing heterogeneous catalysts of desired metal content
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Since the 1990s, Suntola has been working on a theory which he claims to be an replacement for the standard theories of
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1979-02-28/1983-11-01, US 4,413,022 Suntola, Pakkala, Lindfors, Method for performing growth of compound thin films
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1990-01-16/2003-03-18, US 6,534,431 Suntola et al., Process and apparatus for preparing heterogeneous catalysts
479:(4th ed.). Physics foundations society and the Finnish society for natural philosophy. pp. 294–295.
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1974-11-29/1977-11-15, US 4,058,430 Suntola, Antson, Method for producing compound thin films
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171:. After completing his PhD, Suntola made his first industrial development while working at
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The short history of science – or the long path to the union of metaphysics and empiricism
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The Short
History of Science - or the long path to the union of metaphysics and empiricism
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1980-08-20/1983-06-14, US 4,388,554 Suntola, Antson, Electroluminescent display component
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In 1987, Suntola started
Microchemistry Ltd as a subsidiary of the national oil company
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T. Suntola, J. Hyvärinen, "Atomic Layer Epitaxy", Annu. Rev. Mater. Sci. 15 (1985) 177
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for his contribution to the development of information technology on the basis that "
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The Dynamic Universe - Toward a unified picture of physical reality, Fourth edition
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of ALD reactors. He has important patents on ALD technology and thin film devices.
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444:"A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy"
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A short history of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy
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A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy
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T.Suntola, "CdTe Thin-Film Solar Cells", MRS Bulletin, Vol. XVIII, No. 10, 1993
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T. Suntola, "Atomic Layer Epitaxy", Tech. Digest of ICVGE-5, San Diego, 1981
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378:"ALD pioneer Tuomo Suntola explains how his invention sustains Moore's Law"
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1972-11-12/1979-08-21, US 4,164,868 Suntola, Capacitive humidity transducer
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that paved the way for the development of nanoscale semiconductor devices"
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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In 1971, Tuomo Suntola earned his PhD in semiconductor physics from the
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541:"Tech 'Nobel' awarded to Finnish physicist for small smart devices"
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The Dynamic Universe - Toward a unified picture of physical reality
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The Dynamic Universe – Toward a unified picture of physical reality
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249:"Honoring the Pioneer in Atomic Layer Deposition Techniques
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Knights First Class of the Order of the Lion of Finland
523:(Press release). Technology Academy Finland. 2018-05-22
247:In 2004, Suntola received the European SEMI Award
101:- Knight 1st Class, European SEMI Award in 2004,
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606:Tuomo Suntola » Physics Foundations Society
566:(in Swedish). No. 1985–10. p. 22-23.
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192:semiconductor device fabrication
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27:Finnish physicist and inventor
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237:The Short History of Science
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215:Dynamic universe theory
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543:Phys.org, May 22, 2018
461:10.1002/cvde.201402012
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235:. In a related book,
282:Notable publications
184:atomic layer epitaxy
163:Education and career
147:Suntola was born in
651:People from Tampere
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621:Finnish inventors
417:10.1116/1.4971389
340:978-952-68101-0-2
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225:quantum mechanics
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365:References
327:B.V.,1998.
221:relativity
177:Vaisala Oy
143:Early life
580:cite news
572:0533-070X
426:0734-2101
229:cosmology
153:Pirkanmaa
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