24:
288:
175:
37:
47:
641:
532:
542:
537:
642:
637:
786:
982:
Su and
Schlegal studied the decomposition of dichlorosilane using transition state theory (TST) using calculations at the G2 level. Wittbrodt and Schlegel worked with these calculations and improved them using the QCISD(T) method. The primary decomposition products were determined by this method to
643:
1009:
It is a chemically active gas, which will readily hydrolyze and self ignite in air. Dichlorosilane is also very toxic, and preventative measures must be used for any experiment involving the use of the chemical. Safety hazards also includes skin and eye irritation and inhalation.
991:
Dichlorosilane must be ultrapurified and concentrated in order to be used for the manufacturing of semiconducting epitaxial silicon layers, which are used for microelectronics. The buildup of the silicon layers produces thick epitaxial layers, which creates a strong structure.
640:
973:
Another purpose for hydrolyzing dichlorosilane is to obtain linear polysiloxanes, and can be done by many different complex methods. The hydrolysis of dichlorosilane in diethyl ether, dichloromethane, or pentane gives cyclic and linear polysiloxanes.
1125:
Vorotyntsev, V., Mochalov, G., Kolotilova, Volkova, E., Gas-Chromatographic and Mass-Spectrometric
Determination of Impurity Hydrocarbons in Organochlorine Compounds and Dichlorosilane, Journal of Analytical Chemistry, 61(9),
658:
1089:
Vorotyntsev, V., Mochalov, G., Kolotilova, M., Kinetics of
Dichlorosilane Separation from a Mixture of Chlorosilanes by Distillation Using a Regular Packing, Theoretical Foundations of Chemical Engineering, 38(4),
1000:
Dichlorosilane is used as a starting material for semiconducting silicon layers found in microelectronics. It is used because it decomposes at a lower temperature and has a higher growth rate of silicon crystals.
665:
550:
946:
in benzene in brief contact with a large excess of water. A large-scale hydrolysis was done in a mixed ether/alkane solvent system at 0 °C, which gave a mixture of volatile and nonvolatile
512:
966:
at -10 °C. The purpose of completing the hydrolysis of dichlorosilane is to collect the concentrated hydrolysis products, distill the solution, and retrieve a solution of
1116:
Walch, S., Dateo, C., Thermal
Decomposition Pathways and Rates for Silane, Chlorosilane, Dichlorosilance, and Trichlorosilane, Journal of Physical Chemistry, 105, 2015-2022
608:
1148:
23:
799:
746:
869:
327:
1073:
Seyferth, D., Prud'Homme, C., Wiseman, G., Cyclic
Polysiloxanes from the Hydrolysis of Dichlorosilane, Inorganic Chemistry, 22, 2163-2167
481:
600:
1169:
794:
672:
36:
302:
806:
46:
1027:
651:
206:
900:
Most dichlorosilane results as a byproduct of the reaction of HCl with silicon, a reaction intended to give
594:
170:
266:
1104:
Seyferth D., Prud’Homme C., Linear
Polysiloxanes from Dichlorosilane, Inorganic Chemistry, 23, 4412-4417
958:
O as the water source, but the system failed. They did, however, complete the hydrolysis using dilute Et
182:
1034:. USA: National Center for Biotechnology Information. 27 March 2005. Identifiers and Related Records
697:
283:
200:
124:
531:
1164:
1053:
841:
chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH
457:
536:
755:
564:
524:
66:
616:
541:
152:
938:
Stock and
Somieski completed the hydrolysis of dichlorosilane by putting the solution of H
100:
8:
726:
90:
950:. Fischer and Kiegsmann attempted the hydrolysis of dichlorosilane in hexane, using NiCl
287:
174:
907:
970:
oligomers in dichloromethane. These methods were used to obtain cyclic polysiloxanes.
865:
720:
846:
612:
430:
350:
228:
901:
768:
750:
710:
857:
Dichlorosilane was originally prepared by Stock and
Somieski by the reaction of
578:
777:
604:
441:
1158:
419:
409:
163:
821:, or DCS as it is commonly known, is a chemical compound with the formula H
740:
664:
574:
686:
671:
650:
858:
657:
381:
183:
143:
868:. Dichlorosilane reacts with water vapor to initially give monomeric
582:
255:
776:
Except where otherwise noted, data are given for materials in their
623:
123:
830:
399:
215:
892:
Monomeric polymerizes rapidly upon condensation or in solution.
838:
239:
113:
271:
570:
424:8 °C; 46 °F; 281 K at 101 kPa
1156:
227:
639:
99:
586:
1100:
1098:
1096:
910:of trichlorosilane is the preferred route.
1069:
1067:
1065:
1063:
895:
286:
173:
151:
1135:Praxair Material Safety Data Sheet (2007)
1093:
414:−122 °C (−188 °F; 151 K)
1112:
1110:
1060:
282:
205:
1157:
1085:
1083:
1081:
1079:
845:(i.e. 16:1), usually results in lower
829:. In its major use, it is mixed with
691:−37 °C (−35 °F; 236 K)
164:
40:Ball and stick model of dichlorosilane
1054:"Welcome on the new Gas Encyclopedia"
1028:"nchem.403-comp13 - Compound Summary"
705:55 °C (131 °F; 328 K)
314:Key: MROCJMGDEKINLD-UHFFFAOYSA-N
1107:
986:
1076:
995:
218:
13:
635:
45:
35:
14:
1181:
1142:
1004:
50:Spacefill model of dichlorosilane
1151:for dichlorosilane from Praxair®
977:
784:
540:
535:
530:
22:
780:(at 25 °C , 100 kPa).
1129:
1119:
1046:
1020:
1:
1013:
933:
311:InChI=1S/Cl2H2Si/c1-3-2/h3H2
7:
1170:Inorganic silicon compounds
386:101.007 g mol
31:
10:
1186:
852:
774:
732:
511:
506:
450:
343:
323:
298:
83:
75:
65:
60:
30:
21:
595:Precautionary statements
896:Reactions and formation
646:
51:
41:
756:Silicon tetrachloride
645:
446:167.2 kPa (at 20 °C)
49:
39:
983:be SiCl2 and SiClH.
628:(fire diamond)
1056:. 15 December 2016.
431:Solubility in water
78:Silylene dichloride
18:
908:Disproportionation
807:Infobox references
733:Related compounds
647:
52:
42:
16:
1149:Safety data sheet
987:Ultrapurification
866:hydrogen chloride
815:Chemical compound
813:
812:
764:Related compounds
721:Safety data sheet
565:Hazard statements
267:CompTox Dashboard
125:Interactive image
56:
55:
1177:
1136:
1133:
1127:
1123:
1117:
1114:
1105:
1102:
1091:
1087:
1074:
1071:
1058:
1057:
1050:
1044:
1043:
1041:
1039:
1032:PubChem Compound
1024:
996:Advantage of use
891:
797:
791:
788:
787:
747:Monochlorosilane
711:Explosive limits
676:
675:
667:
660:
653:
638:
618:
614:
610:
606:
602:
588:
584:
580:
576:
572:
544:
539:
534:
498:
471:
451:Thermochemistry
375:
374:
373:
365:
364:
351:Chemical formula
291:
290:
275:
273:
231:
220:
209:
185:
177:
166:
155:
127:
103:
32:
26:
19:
15:
1185:
1184:
1180:
1179:
1178:
1176:
1175:
1174:
1155:
1154:
1145:
1140:
1139:
1134:
1130:
1124:
1120:
1115:
1108:
1103:
1094:
1088:
1077:
1072:
1061:
1052:
1051:
1047:
1037:
1035:
1026:
1025:
1021:
1016:
1007:
998:
989:
980:
969:
965:
961:
957:
953:
949:
945:
941:
936:
929:
925:
921:
917:
902:trichlorosilane
898:
889:
885:
881:
877:
873:
862:
855:
849:nitride films.
844:
836:
828:
824:
816:
809:
804:
803:
802: ?)
793:
789:
785:
781:
769:Dichloromethane
765:
753:
751:Trichlorosilane
749:
743:
702:
699:
681:
680:
679:
678:
673:
669:
662:
655:
648:
644:
636:
597:
567:
553:
527:
502:−320.49 kJ mol
499:
496:
490:
486:
483:
482:Std enthalpy of
475:286.72 J K mol
472:
469:
462:
459:
433:
394:Colourless gas
372:
369:
368:
367:
363:
360:
359:
358:
356:
353:
339:
336:
331:
330:
319:
316:
315:
312:
306:
305:
294:
276:
269:
250:
234:
221:
195:
158:
130:
117:
106:
93:
79:
71:
17:Dichlorosilane
12:
11:
5:
1183:
1173:
1172:
1167:
1153:
1152:
1144:
1143:External links
1141:
1138:
1137:
1128:
1118:
1106:
1092:
1075:
1059:
1045:
1018:
1017:
1015:
1012:
1006:
1005:Safety hazards
1003:
997:
994:
988:
985:
979:
976:
967:
963:
959:
955:
951:
947:
943:
939:
935:
932:
931:
930:
927:
923:
919:
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897:
894:
887:
883:
879:
875:
860:
854:
851:
842:
834:
826:
822:
819:Dichlorosilane
814:
811:
810:
805:
783:
782:
778:standard state
775:
772:
771:
766:
763:
760:
759:
744:
738:
735:
734:
730:
729:
724:
717:
716:
713:
707:
706:
703:
696:
693:
692:
689:
683:
682:
670:
663:
656:
649:
634:
633:
632:
631:
629:
620:
619:
609:P305+P351+P338
598:
593:
590:
589:
568:
563:
560:
559:
554:
549:
546:
545:
528:
523:
520:
519:
509:
508:
504:
503:
500:
494:
488:
480:
477:
476:
473:
467:
456:
453:
452:
448:
447:
444:
442:Vapor pressure
438:
437:
434:
429:
426:
425:
422:
416:
415:
412:
406:
405:
402:
396:
395:
392:
388:
387:
384:
378:
377:
370:
361:
354:
349:
346:
345:
341:
340:
338:
337:
334:
326:
325:
324:
321:
320:
318:
317:
313:
310:
309:
301:
300:
299:
296:
295:
293:
292:
279:
277:
265:
262:
261:
258:
252:
251:
249:
248:
244:
242:
236:
235:
233:
232:
224:
222:
214:
211:
210:
207:dichlorosilane
203:
197:
196:
194:
193:
189:
187:
179:
178:
168:
160:
159:
157:
156:
148:
146:
140:
139:
136:
135:Abbreviations
132:
131:
129:
128:
120:
118:
111:
108:
107:
105:
104:
96:
94:
89:
86:
85:
81:
80:
77:
73:
72:
70:Dichlorosilane
69:
63:
62:
58:
57:
54:
53:
43:
28:
27:
9:
6:
4:
3:
2:
1182:
1171:
1168:
1166:
1165:Chlorosilanes
1163:
1162:
1160:
1150:
1147:
1146:
1132:
1122:
1113:
1111:
1101:
1099:
1097:
1086:
1084:
1082:
1080:
1070:
1068:
1066:
1064:
1055:
1049:
1033:
1029:
1023:
1019:
1011:
1002:
993:
984:
978:Decomposition
975:
971:
913:
912:
911:
909:
905:
903:
893:
871:
867:
863:
850:
848:
840:
832:
820:
808:
801:
796:
779:
773:
770:
767:
762:
761:
758:
757:
752:
748:
745:
742:
741:chlorosilanes
737:
736:
731:
728:
725:
722:
719:
718:
714:
712:
709:
708:
704:
701:
695:
694:
690:
688:
685:
684:
677:
668:
661:
654:
630:
627:
626:
622:
621:
599:
596:
592:
591:
569:
566:
562:
561:
558:
555:
552:
548:
547:
543:
538:
533:
529:
526:
522:
521:
517:
515:
510:
505:
501:
493:
485:
479:
478:
474:
466:
461:
455:
454:
449:
445:
443:
440:
439:
435:
432:
428:
427:
423:
421:
420:Boiling point
418:
417:
413:
411:
410:Melting point
408:
407:
403:
401:
398:
397:
393:
390:
389:
385:
383:
380:
379:
355:
352:
348:
347:
342:
333:
332:
329:
322:
308:
307:
304:
297:
289:
285:
284:DTXSID1052082
281:
280:
278:
268:
264:
263:
259:
257:
254:
253:
246:
245:
243:
241:
238:
237:
230:
226:
225:
223:
217:
213:
212:
208:
204:
202:
199:
198:
191:
190:
188:
186:
181:
180:
176:
172:
169:
167:
165:ECHA InfoCard
162:
161:
154:
150:
149:
147:
145:
142:
141:
137:
134:
133:
126:
122:
121:
119:
115:
110:
109:
102:
98:
97:
95:
92:
88:
87:
82:
74:
68:
64:
59:
48:
44:
38:
34:
33:
29:
25:
20:
1131:
1121:
1048:
1036:. Retrieved
1031:
1022:
1008:
999:
990:
981:
972:
937:
906:
899:
856:
818:
817:
754:
698:Autoignition
624:
556:
513:
491:
464:
240:RTECS number
84:Identifiers
76:Other names
1038:30 November
886:O → SiH
870:prosiloxane
700:temperature
687:Flash point
551:Signal word
404:4.228 g cm
391:Appearance
344:Properties
171:100.021.717
1159:Categories
1014:References
934:Hydrolysis
890:O + 2 HCl
727:inchem.org
525:Pictograms
382:Molar mass
144:ChemSpider
112:3D model (
91:CAS Number
67:IUPAC name
617:P410+P403
516:labelling
484:formation
458:Std molar
256:UN number
247:VV3050000
192:223-888-3
184:EC Number
101:4109-96-0
739:Related
715:4.1–99%
625:NFPA 704
507:Hazards
1126:883-888
1090:355-359
914:2 SiHCl
853:History
831:ammonia
800:what is
798: (
460:entropy
436:Reacts
400:Density
376:
216:PubChem
918:⇌ SiCl
847:stress
795:verify
792:
723:(SDS)
557:Danger
328:SMILES
61:Names
962:O/CCl
922:+ SiH
864:with
839:LPCVD
837:) in
303:InChI
260:2189
229:61330
153:55266
114:JSmol
1040:2011
942:SiCl
882:+ H
825:SiCl
613:P310
605:P261
601:P210
587:H330
583:H314
579:H280
575:H250
571:H220
335:ClCl
201:MeSH
138:DCS
954:⋅6H
874:SiH
859:SiH
833:(NH
514:GHS
495:298
468:298
357:SiH
272:EPA
219:CID
1161::
1109:^
1095:^
1078:^
1062:^
1030:.
926:Cl
904:.
878:Cl
872::
615:,
611:,
607:,
603:,
585:,
581:,
577:,
573:,
518::
487:(Δ
366:Cl
1042:.
968:n
964:4
960:2
956:2
952:2
948:n
944:2
940:2
928:2
924:2
920:4
916:3
888:2
884:2
880:2
876:2
861:4
843:3
835:3
827:2
823:2
790:N
674:W
666:2
659:4
652:4
497:)
492:H
489:f
470:)
465:S
463:(
371:2
362:2
274:)
270:(
116:)
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