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96:. The detectors provide information-rich images which offer topographic, material, crystallographic, and electrical properties of the sample. In contrast to other ion beams, there is no discernible sample damage due to relatively light mass of the helium ion. The drawback is the cost.
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as the emitting source. As the helium ion beam interacts with the sample, it does not suffer from a large excitation volume, and hence provides sharp images with a large
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of the helium ions, which is inversely proportional to their momentum, it is possible to obtain qualitative data not achievable with conventional
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on a wide range of materials. Compared to a SEM, the secondary electron yield is quite high, allowing for imaging with currents as low as 1
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Iberi, Vighter; Vlassiouk, Ivan; Zhang, X.-G.; Matola, Brad; Linn, Allison; Joy, David C.; Rondinone, Adam J. (2015).
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Carl Zeiss SMT Ships World’s First ORION Helium Ion
Microscope to U.S. National Institute of Standards and Technology
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techniques, it allows to combine milling and cutting of samples with their observation at sub-nanometer resolution.
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ALIS Corporation
Announces Breakthrough in Helium Ion Technology for Next-Generation Atomic-Level Microscope
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188:"Maskless Lithography and in situ Visualization of Conductivity of Graphene using Helium Ion Microscopy"
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Comparison of SEM (top) and SHIM (bottom) images of mouse enamel. SHIM images have a superior
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Carl Zeiss Sets New World Record in
Microscopy Resolution Using Scanning Helium Ions
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SHIMs have been commercially available since 2007, and a surface resolution of 0.24
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Bidlack, Felicitas B.; Huynh, Chuong; Marshman, Jeffrey; Goetze, Bernhard (2014).
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Carl Zeiss SMT – Nano
Technology Systems Division: ORION He-Ion microscope
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In terms of imaging, SHIM has several advantages over the traditional
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72:(SEM). Owing to the very high source brightness, and the short
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310:Microscopy Today, Volume 14, Number 04, July 2006:
176:, December 7, 2005 (retrieved on November 22, 2008)
267:Microscopy resolution record claimed by Carl Zeiss
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57:) is an imaging technology based on a scanning
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313:An Introduction to the Helium Ion Microscope
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22:An Orion Nanofab helium ion microscope by
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43:scanning helium ion microscope
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61:ion beam. Similar to other
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342:This science article is a
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126:Frontiers in Physiology
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